Method and apparatus for low pressure testing of a solid state p

Details Method and apparatus for low pressure testing of a solid state p Method and apparatus for low pressure testing of a solid state p

1986-08-25

1988-03-29

Noland, Tom

Measuring and testing

Instrument proving or calibrating

Volume of flow, speed of flow, volume rate of flow, or mass...

G01L 2700

Patent

active

047335530

ABSTRACT:
The present invention consists of a miniature vacuum chamber that is capable of testing individual dice prior to packaging. The upper portion of the chamber consists of a housing having testing probes and a vacuum inlet disposed therein. The lower portion of the chamber consists of a chuck that holds a wafer and a lower vacuum chamber. The lower portion is indexed to place a dice in contact with the probes. The upper and lower portions then form a seal and a vacuum is drawn in the area defined by the upper and lower chambers. The dice is then tested; the area pressurized; and the chuck indexed to test the next dice.

REFERENCES:
patent: 3060718 (1962-10-01), Malkiel
patent: 4211119 (1980-07-01), Wolber

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