Coating processes – Coating by vapor – gas – or smoke
Patent
1985-01-22
1986-10-28
Childs, Sadie L.
Coating processes
Coating by vapor, gas, or smoke
118663, 118688, 118692, 118719, 118725, 118726, C23C 1600, B05C 1100
Patent
active
046198440
ABSTRACT:
A method of introducing a controlled flow of vapor from a high pressure sublimation chamber into a low pressure vapor deposition reactor, said vapor being derived from solid source material preferably, but not necessarily, having a vapor pressure above about one (1) Torr at a temperature not exceeding about 350.degree. C. The method comprises controllably heating the source material to a temperature sufficient to produce vapor therefrom at a desired pressure, and then controllably transferring the vapor through vapor transmission means to the vapor deposition reactor. During such transfer, the transmission means is maintained at a temperature sufficient to prevent condensation of the vapor therein during transfer. The vapor is delivered to the reactor in a pure state and is not mixed with any carrier medium.
REFERENCES:
patent: 3666553 (1972-05-01), Arthur et al.
patent: 4152478 (1979-05-01), Takagi
patent: 4167915 (1979-09-01), Toole et al.
patent: 4395440 (1983-07-01), Abe et al.
patent: 4438153 (1984-03-01), Pinkhason
patent: 4484943 (1984-11-01), Miura et al.
patent: 4516527 (1985-05-01), Sugioka
Lehrer William I.
Pierce John M.
Carroll David H.
Childs Sadie L.
Fairchild Camera & Instrument Corp.
Murray William H.
Silverman Carl L.
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