Method and apparatus for long-term monitoring of pollutants and

Details Method and apparatus for long-term monitoring of pollutants and Method and apparatus for long-term monitoring of pollutants and

1982-10-13

1984-11-20

Marcus, Michael S.

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing gas sample

422 83, 422 88, 436148, G01N 702

Patent

active

044838247

ABSTRACT:
Long-term monitoring of pollutants or moisture in a fluid stream, such as an air stream, is achieved by electrically measuring (and optionally recording) pressure changes caused by a reaction between a pollutant or moisture in the stream and a chemical capable of reacting with such pollutant or moisture. The invention is useful for monitoring apparatus used in environment protection as well as measuring apparatus in determining moisture concentrations in, for example, protective or carrier gas streams utilized in semiconductor technology.

REFERENCES:
patent: 3029643 (1962-04-01), Stern
patent: 3479864 (1969-11-01), Patterson
patent: 3801838 (1974-04-01), Kistler
patent: 4216404 (1980-08-01), Kurtz et al.

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