Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Reexamination Certificate
2005-02-08
2005-02-08
Norton, Nadine G. (Department: 1765)
Cleaning and liquid contact with solids
Apparatus
With plural means for supplying or applying different fluids...
C134S002000, C134S032000, C134S033000, C156S345110, C156S345170, C156S345180
Reexamination Certificate
active
06851435
ABSTRACT:
A method and apparatus for dispensing a liquid on the surface of a localized zone of a substrate, for example for cleaning of etching purposes. Along with the liquid, a gaseous tensio-active substance is supplied, which is miscible with said liquid and when mixed with the liquid, reduces the surface tension of said liquid, thus containing the liquid in a local zone of the substrate surface.
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European Patent Office Search Report, Application No EP 00 87 0135.
Heyns Marc
Mertens Paul
Meuris Marc
Ahmed Shamim
Interuniversitair Microelektronica Centrum (IMEC vzw)
McDonnell Boehnen & Hulbert & Berghoff LLP
Norton Nadine G.
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