Material or article handling – Device for emptying portable receptacle – Nongravity type
Patent
1997-08-25
2000-04-25
Werner, Frank E.
Material or article handling
Device for emptying portable receptacle
Nongravity type
414217, 414939, 414937, 4147443, 41422501, 414627, 414941, 4146843, 432239, 118719, 29705, B65G 4907
Patent
active
060536888
ABSTRACT:
A wafer handling apparatus and method includes a wafer carrier station for supporting a wafer carrier, such as an enclosed pod, that holds one or more wafers. A grounded interface panel is provided between the carrier station and a clean testing or processing environment. A z-movement mechanism moves the carrier station and the wafer carrier in a z-direction. A door opening mechanism removes a door from said carrier through a door opening in the interface panel. A handler mechanism includes a wafer holding device, such as a flat end effector, that moves into the wafer carrier at a separate access opening to load or unload a wafer to or from the wafer carrier. Wafer carriers holding different amounts of wafers can be used with no major structural changes to the apparatus.
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