Material or article handling – Device for emptying portable receptacle – Nongravity type
Reexamination Certificate
2006-04-25
2006-04-25
Brahan, Thomas J. (Department: 3654)
Material or article handling
Device for emptying portable receptacle
Nongravity type
C414S416080, C414S937000, C414S941000
Reexamination Certificate
active
07033126
ABSTRACT:
A receiver frame loads and unloads a batch of semiconductor wafers onto wafer holders in a wafer boat. The wafer holders extends continuously about the perimeter of an overlying wafer. The receiver frame is provided with a plurality of supporting arms which are immovably mounted to a vertically extending structure. The supporting arms are coaxially aligned and vertically spaced in a manner corresponding with the spacing of the wafer holders in the wafer boat. Each supporting arm is configured to be accommodated below a support ring, with its distal end extending to align with the center region of the wafer holder. The distal end of each supporting arm is provided with at least three support pins to support a wafer vertically spaced above a wafer holder. To load wafers onto the wafer holders, after placing the wafers upon the support pins, the wafer holders are moved above the support pins so that the wafer holders contact and lift the wafers off the support pins.
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ASM International N.V.
Brahan Thomas J.
Knobbe Martens Olson & Bear LLP
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