Method and apparatus for lithographic imaging using...

Details Method and apparatus for lithographic imaging using... Method and apparatus for lithographic imaging using...

2009-01-28

2011-10-11

Kao, Glen (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

Reexamination Certificate

active

08035802

ABSTRACT:
According to one aspect of the present invention, a method and apparatus for processing a substrate may be provided. A reticle may be positioned relative to a substrate. The reticle may have a plurality of features with dimensions extending in a first and a second direction and being asymmetric in the first direction. Electromagnetic radiation may be directed onto the reticle. The electromagnetic radiation may have a first portion propagating onto the reticle in substantially the first direction and being incident on the reticle at a first angle and a second portion propagating onto the reticle in substantially the second direction and being incident on the reticle at a second angle. The second angle being greater than the first angle.

REFERENCES:
patent: 2004/0137338 (2004-07-01), Inao et al.
patent: 2005/0123838 (2005-06-01), Chang et al.
patent: 2007/0177123 (2007-08-01), Tel et al.
patent: 2007/0291244 (2007-12-01), Chang et al.

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