Method and apparatus for linking reticle manufacturing data

Details Method and apparatus for linking reticle manufacturing data Method and apparatus for linking reticle manufacturing data

2006-04-04

2011-11-01

Decady, Albert (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C438S014000, C382S144000, C707S600000, C707S609000, C702S108000

Reexamination Certificate

active

08050793

ABSTRACT:
A method includes providing a design data file specifying at least one target feature on a first reticle. A reticle qualification data file specifying a plurality of feature measurements associated with features formed using the first reticle is provided. At least one of the feature measurements is linked to the target feature on the first reticle. The target feature and the linked feature measurement are stored in a data store.

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