Method and apparatus for laser zone melting

Details Method and apparatus for laser zone melting Method and apparatus for laser zone melting

1977-05-24

1979-12-04

Truhe, J. V.

Electric heating

Metal heating

By arc

219121LM, B23K 900

Patent

active

041773721

ABSTRACT:
A method for laser zone melting and apparatuses therefor wherein, in a zone melting method for a thin film due to the irradiation of laser beam, the laser beam is vibrated at the frequency of more than 1 Hz in the direction substantially perpendicular to the moving direction of a melting zone and the fluctuation of laser beam output is controlled to less than 1%. The zone-melted thin films manufactured by this method have good electrical properties resulting from less crystal imperfection, less non-stoichiometric excess atoms of the constituents, and less thickness corrugation of the film due to the suppression of temperature fluctuations and its spacial inhomogeneity at the time of zone melting.

REFERENCES:
patent: 3287107 (1966-11-01), Eaton
patent: 3699649 (1972-10-01), McWilliams
patent: 3848104 (1974-11-01), Locke
patent: 3986391 (1976-10-01), Vahaviolos

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