Method and apparatus for laser micromachining a conical surface

Details Method and apparatus for laser micromachining a conical surface Method and apparatus for laser micromachining a conical surface

2005-12-02

2010-10-12

Hoang, Tu B (Department: 3742)

Electric heating

Metal heating

By arc

C219S121600, C219S121670, C219S121750, C219S121820

Reexamination Certificate

active

07812280

ABSTRACT:
Embodiments of the present invention are directed to methods and systems for micromachining a conical surface. In one embodiment, such a system may include a rotating platform for receiving a long line of laser illumination, a mask having a predetermined pattern comprising a sector of a planar ring, the mask being positioned on the rotating platform, a workpiece stage having a rotational axis for rotating a removably-affixed workpiece comprising a conical surface, wherein the sector comprises the planar image of the conical surface, an excimer laser for producing a laser beam, a homogenizer for homogenizing the laser beam in at least a single direction, at least one condenser lens, a turning mirror and at least one projection lens.

REFERENCES:
patent: 5466908 (1995-11-01), Hosoya et al.
patent: 5760366 (1998-06-01), Haruta et al.
patent: 6008914 (1999-12-01), Sasagawa et al.
patent: 6091047 (2000-07-01), Miyakawa et al.
patent: 2003/0196996 (2003-10-01), Jennings et al.
patent: 2004/0223330 (2004-11-01), Broude et al.
patent: 0 575 850 (1993-12-01), None
patent: 2001096389 (2001-04-01), None
Machine Translation of JP 2001-096389.
International Search Report dated Apr. 12, 2006 corresponding to PCT/US2005/043681 filed Dec. 2, 2005.

Affiliated with

Also associated with

Rating

Method and apparatus for laser micromachining a conical surface does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for laser micromachining a conical surface, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for laser micromachining a conical surface will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4166478