Method and apparatus for laser machining

Details Method and apparatus for laser machining Method and apparatus for laser machining

1992-07-28

1994-05-17

Albritton, C. L.

Electric heating

Metal heating

By arc

21912174, 21912184, 21912169, B23K 2600

Patent

active

053130430

ABSTRACT:
An equipment for excimer laser ablation machining provided a laser (11), a main body (14) housing a mirror (12) for reflecting an ultraviolet ray emitted by the laser and an optical system (13) for arranging the ultraviolet ray to a parallel ray, and a means (15) for moving the relative position of an object to be machined and the parallel ray, the means (15) being a supporter of an object to be machined and having a means (16) for arranging a dielectric mirror mask (7), leaving a space of 0.1 mm through 50 mm, preferably 0.1 mm through 1 mm, between the object to be machined and the dielectric mirror mask (7), the equipment to be employed specifically for producing a via hole of a multi-layered circuit board, and a method for excimer laser ablation machining conducted by employing the foregoing equipment.

REFERENCES:
patent: 4405238 (1983-09-01), Grobman et al.
patent: 4661679 (1987-04-01), Pardee
patent: 5019074 (1991-05-01), Muller
patent: 5142120 (1992-08-01), Hanson et al.

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