Method and apparatus for irradiation of active energy beam

Details Method and apparatus for irradiation of active energy beam Method and apparatus for irradiation of active energy beam

2005-08-16

2005-08-16

Nguyen, Lamson (Department: 2853)

Radiant energy

Irradiation of objects or material

C118S050100

Reexamination Certificate

active

06930315

ABSTRACT:
A target object to be irradiated is transported into an irradiating chamber through a transport inlet for irradiation with an active energy beam under an inert gas atmosphere in an active energy beam irradiating section included in the irradiating chamber and, then is transported out of the irradiating chamber. When the object is subject to above steps, the gas flow resistance at the transport outlet is controlled such that the active energy beam irradiation is carried out under the condition of X/Y≧1, where X represents the gas amount passing through the transport inlet, and Y represents the gas amount passing through the transport outlet.

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