Method and apparatus for irradiating laser

Details Method and apparatus for irradiating laser Method and apparatus for irradiating laser

2011-04-05

2011-04-05

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Dimension

Area

C356S425000, C356S408000, C356S388000, C356S398000, C438S014000

Reexamination Certificate

active

07920277

ABSTRACT:
A laser irradiation process includes: scanning a substrate with laser having a predetermined lasing frequency at different irradiation intensities to form a plurality of first irradiation areas corresponding to the irradiation intensities; illuminating the first irradiation areas to reflected light receive from the first irradiation areas; determining microcrystallization intensity based on the received reflected light; and determining irradiation intensity based on the thus determined microcrystallization intensity. The laser irradiation process uses the irradiation intensity for irradiating a polycrystalline film in a product semiconductor device.

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