Method and apparatus for ion beam profiling

Details Method and apparatus for ion beam profiling Method and apparatus for ion beam profiling

2006-06-20

2006-06-20

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S397000

Reexamination Certificate

active

07064340

ABSTRACT:
An ion beam current density profiler includes a pair of counter-rotating cylindrical masks each featuring a helical slot. The intersection of the slots forms an aperture that scans the width of a ribbon ion beam to allow discrete portions of the beam to impact an inner, concentric current collecting cylinder.

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