Method and apparatus for investigating the latch-up propagation

Details Method and apparatus for investigating the latch-up propagation Method and apparatus for investigating the latch-up propagation

1989-05-03

1991-04-30

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250341, 2503581, 2503601, 250347, G01J 500, H04N 300, H04N 718

Patent

active

050121006

ABSTRACT:
Since known methods for investigating latch-up propagation have only a comparatively slight chronological resolution, a method and apparatus are proposed in which latch-up is periodically triggered and the intensity of the infrared radiation emanating from an integrated circuit is sensed at a plurality of measuring points that cover the circuit in a grid-like manner in order to respectively determine, at the measuring points, within what time span the intensity of the infrared radiation reaches a threshold, and to respectively register a measured value representing the time interval in a location-dependent manner.

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patent: 4769686 (1988-09-01), Horiuchi et al.
patent: 4786170 (1988-11-01), Groebler
Zanoni et al, "Observation of Latch-Up Time Evolution in CMOS IC's by Means of SEM Stroboscopic Voltage Contrast Techniques", IEEE Journal of Solid-State Circuits, vol. SC-22, No. 1, Feb. 1989, pp. 65-70.
Quincke et al, "Investigation of Surface-Induced Latch-Up in VLSI CMOS Using the Laser Probe", Microelectronic Engineering, vol. 7, 1987, pp. 371-375.
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Khwranan, "Pulsed Infra-Red Microscopy for Debugging Latchup on CMOS Products", IEEE/IRPS, vol., 1984, pp. 122-127.
Muller R., "Scanning Laser Microscope for Inspection of Microelectronic Devices", Siemens Forsch v. Entwickl-Ber, vol. 13, No. 1, 1984, pp. 9-14.
Otto et al, "Schaltungsznalyse in IC's mit dem Rzsterlzser Mikroscop", VDI Berichte, No. 659, 1987, pp. 381-394.

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