Method and apparatus for investigating latch-up propagation in c

Details Method and apparatus for investigating latch-up propagation in c Method and apparatus for investigating latch-up propagation in c

1989-05-03

1991-07-09

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

With means to inspect passive solid objects

250330, 2503381, 250341, 2504581, G01J 502, G01N 2164, G01R 3128

Patent

active

050308297

ABSTRACT:
Latch-up propagation is periodically triggered and the intensity of infrared radiation emanating from a CMOS circuit is successively detected at a plurality of measuring points covering the circuit in a grid-like manner at prescribed points in time after the appearance of the trigger signal which triggers latch-up and a measured value representing the intensity of infrared radiation is recorded in a location-dependent manner. The measured values are monitored with a display and the intensity thereof is utilized as the brightness control for the picture elements. Also, the measured values are stored in an image store.

REFERENCES:
patent: 4680635 (1987-07-01), Khurana
patent: 4755874 (1988-06-01), Esrig et al.
Zanoni, E. et al., "Observation of Latch-up Time Evolution in CMOS IC's by Means of SEM Stroboscopic Voltage Contrast Techniques", IEEE Journal of Solid State Circuits SC-22, No. 1, Feb. (1987), pp. 65-70.
Quincke, J. et al., "Investigation of Surface-Induced Latch-Up in VLSI CMOS Using The Laser Probe", Microelectric Engineering, 7 (1987) Nos. 2-4, pp. 371-375.
Otto et al. "Schaltungsanzlyses in ICs mit dem Rasterlaser-mikroscop", VDI Berichte, No. 659, 1987, pp. 381-394.
Muller R., "Scanning Laser Microscope for Inspection of Micro-Electronic Devices", Siemens Forsch-u. Entwickl.-Ber., vol. 13, No. 1, 1984, pp. 9-14.
Khuranan., "Pulsed Infra-Red Microscopy for Debugging Latch-Up on CMOS Products," IEEE/IRPS 1984, pp. 122-127.
Wilke V., "Optical Scanning Microscopy-The Laser Scan Microscope," Scanning, vol. 7, 1985, pp. 88-96.

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