Radiant energy – Photocells; circuits and apparatus – Interference pattern analysis
Patent
1978-04-21
1979-10-02
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Interference pattern analysis
356345, 358107, G02B 2738
Patent
active
041699807
ABSTRACT:
An electro-optical sensor is described which provides an output for precisely locating the centers of interference fringes in either a real-time interference pattern or an interferogram. By scanning the fringe pattern either by moving the fringe pattern, by effectively moving the photoelectric sensor, or both, the centers of the fringes can be rapidly and precisely determined from the first derive of the output of the photodetector.
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"The Rapid Measurement of Photographic Records of Interference Fringes", J. Dyson, Appl. Optics, V. 2, pp. 487-489 (1963).
"A Method for the Precise Evaluation of Interferograms", G. D. Dew, J. Sci. Instr., vol. 41, pp. 160-162 (1964).
"An Automated Interferogram Technique", Jones et al., App. Optics, vol. 7, pp. 1477-1482 (1968).
"Analysis of Interferograms", R. Berggren, Optical Spectra, pp. 22-25 (1970, Dec.).
IBM Tech. Disclosure Bulletin, vol. 20, No. 1, Jun. 1977, pp. 206-214.
"Interferometry", C. Zanoni, The Optical Industry and Systems Directory Encyclopedia, vol. 2, pp. E137-E141 (1977).
Nelms David C.
Zucker Milton
Zygo Corporation
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