Method and apparatus for integrated wafer handling and testing

Details Method and apparatus for integrated wafer handling and testing Method and apparatus for integrated wafer handling and testing

1997-11-04

2000-12-26

Hess, Douglas

Material or article handling

Device for emptying portable receptacle

Nongravity type

41422201, 414936, 414937, 414941, G01R 104

Patent

active

061648949

ABSTRACT:
A wafer handling and testing apparatus and method include a station for supporting a wafer carrier, such as a cassette or pod, that holds one or more wafers, where the carrier can be moved in a z-direction. A wafer handling assembly is moveable in an x-direction and removes a wafer from the wafer carrier. The handling assembly includes an end effector and a sensor for detecting an edge of the wafer. A chuck includes a platform that is movable in a z-direction and is used to lift the wafer from the handling assembly and rotate the wafer so that the sensor maps the edge of the wafer. The wafer is then centered on the platform, lowered onto the chuck, and is tested by a test head that is preferably coupled to the handling assembly.

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Creative Design Engineering, Inc., ResMap 4 point probe Rs Mapping Tool, Jun. 1997.

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