Method and apparatus for inspecting surface defects on the magne

Details Method and apparatus for inspecting surface defects on the magne Method and apparatus for inspecting surface defects on the magne

1984-12-07

1987-06-23

Willis, Davis L.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250563, 250572, G01N 2189

Patent

active

046748750

ABSTRACT:
Method and apparatus for inspecting surface defects of a sample in which oblique illumination is applied onto a surface of the sample and in which illuminance of reflected beams generated from the surface is measured. Shading plate having double pinholes or double slits is used as means for shading a scattered beam from aventurine prominences of the sample surface to fully shade the scattered beam so that the inspection is accurately executed.

REFERENCES:
patent: 3734626 (1973-05-01), Roberts et al.
patent: 4395122 (1983-07-01), Southgate et al.
patent: 4423331 (1983-12-01), Koizumi et al.

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