Method and apparatus for inspecting slider using moving stage

Television – Special applications – Manufacturing

Reexamination Certificate

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Details

C348S087000, C356S237400, C356S237500

Reexamination Certificate

active

08040375

ABSTRACT:
A method for inspecting a slider having a substantially rectangular parallelepiped shape is provided. The method has: a lifting step of lifting said slider upward and stopping said slider at an inspecting position while supporting said slider at an undersurface of said slider, wherein said undersurface is a surface that is other than a first surface, said first surface being an air bearing surface or a surface that is to be formed in said air bearing surface; and an inspection step of simultaneously inspecting said first surface and a second surface of said slider, said second surface being a surface that is other than said first surface and said undersurface, wherein said first surface is inspected by a first camera and said second surface is inspected by a second camera, said first and second cameras being arranged in advance such that an optical axis thereof passes through said inspecting position.

REFERENCES:
patent: 6501545 (2002-12-01), Komuro et al.
patent: 7129484 (2006-10-01), Hwu
patent: 7147539 (2006-12-01), Hao et al.
patent: 05-223534 (1993-08-01), None
patent: 2002-48716 (2002-02-01), None

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