Method and apparatus for inspecting semiconductor devices for th

Details Method and apparatus for inspecting semiconductor devices for th Method and apparatus for inspecting semiconductor devices for th

1988-04-04

1989-10-17

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250561, G01N 2186

Patent

active

048749567

ABSTRACT:
An apparatus and a method for inspecting semiconductor devices, where a focused laser beam scans the semiconductor device, and the reflected beam thereof indicating height information of the reflection positions on the semiconductor device is detected for producing detected signals. The detected signals are compared with predetermined acceptance levels of height and distance.

REFERENCES:
patent: 4112309 (1978-09-01), Nakazawa et al.
patent: 4115650 (1979-05-01), Yasue et al.
patent: 4264202 (1981-04-01), Gugliotta et al.
patent: 4736108 (1988-04-01), Comstock et al.
patent: 4739175 (1988-04-01), Tamura
Laser Type Optical Switch/LZ series (catalog) Keyence Corp. Published: Sep. 1986, pp. 1-6.

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