Method and apparatus for inspecting samples, and method for...

Details Method and apparatus for inspecting samples, and method for... Method and apparatus for inspecting samples, and method for...

2007-07-24

2007-07-24

Toatley, Jr., Gregory J. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

10855808

ABSTRACT:
A method for alignment of a chip in a substrate surface inspection is provided, in which a surface of a substrate including a chip formed therein is inspected by using a beam. The method is characterized in comprising: a step of placing the substrate so that the chip is positioned within a field of view subject to the inspection; a step of measuring a magnification for the detection when the chip is positioned within the field of view subject to the inspection; a step of calculating a size of position error of the chip based on the measured magnification for the detection; and a step of compensating for the position of the chip based on the calculated position error.

REFERENCES:
patent: 6310341 (2001-10-01), Todokoro et al.
patent: 6320187 (2001-11-01), Enichen
patent: 6476388 (2002-11-01), Nakagaki et al.
patent: 6515296 (2003-02-01), Komatsu et al.
patent: 2001/0054692 (2001-12-01), Nakada et al.
patent: 2002/0088940 (2002-07-01), Watanabe et al.
patent: 2002/0179812 (2002-12-01), Kochi et al.
patent: 3-075507 (1991-03-01), None
patent: 5-190639 (1993-07-01), None
patent: 9-232387 (1997-09-01), None
patent: 11-185688 (1999-07-01), None
patent: 11-219993 (1999-08-01), None
patent: 2001-84944 (2001-03-01), None
patent: 2001-357812 (2001-12-01), None
B. Lischke et al.,Multi-Beam Concepts for Nanometer Devices, Japanese Journal of Applied Physics, vol. 28, No. 10, pp. 2058-2064, 1989.
Translation of Written Opinion of the International Searching Authority Form PCT/ISA/237 of International Application No. PCT/JP2004/007351 filed May 28, 2004.

Affiliated with

Also associated with

Rating

Method and apparatus for inspecting samples, and method for... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for inspecting samples, and method for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for inspecting samples, and method for... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3748418