Method and apparatus for inspecting reticles

Details Method and apparatus for inspecting reticles Method and apparatus for inspecting reticles

1988-02-25

1989-10-24

McGraw, Vincent P.

Optics: measuring and testing

Of light reflection

With diffusion

356237, G01N 2147

Patent

active

048757802

ABSTRACT:
A laser light inspection device for inspecting opposite surfaces of a workpiece with a low angle laser light beam. The laser light beam is directed in successive scans of a first and second sides in a repetitive manner using a pair of dividing mirrors and a pair of low angle mirrors. Light reflected by any debris back toward the direction of origin of the light beam is collected and analyzed.

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patent: 4614427 (1986-09-01), Koizumi et al.
patent: 4630276 (1986-12-01), Moran
patent: 4669875 (1987-06-01), Shiba et al.

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