Method and apparatus for inspecting or testing a sample by optic

Details Method and apparatus for inspecting or testing a sample by optic Method and apparatus for inspecting or testing a sample by optic

1998-04-29

2000-02-29

Pham, Hoa Q.

Optics: measuring and testing

Material strain analysis

By light interference detector

356353, G01B 902

Patent

active

060316020

ABSTRACT:
A sample (1) is inspected or tested by illumination in which a line of coherent radiation (2) is scanned across the sample (1) with zero shear in the direction of scan. Two laterally displaced images of the sample (1) are generated which are phase stepped by stepping or ramping the phase of one of the two images during each of the line scans so that successive lines are incremented in phase to encode temporally information about the sample in one frame. The encoded information is decoded by running a vertical convolution mask (17) over the encoded frame image.

REFERENCES:
patent: 4682892 (1987-07-01), Chawla
patent: 5091776 (1992-02-01), Tyson, II
patent: 5094528 (1992-03-01), Tyson, II et al.
patent: 5257089 (1993-10-01), Stetson
patent: 5481356 (1996-01-01), Pouet et al.
Phase-stepped speckle shearing interferometer by source wavelength modulation; J.R. Huang, et al, 1996 Optical Society of America, Sep. 15, 1996, vol. 21, No. 18/Optics Letters, pp. 1421-1423.

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