Method and apparatus for inspecting integrated circuit probe car

Details Method and apparatus for inspecting integrated circuit probe car Method and apparatus for inspecting integrated circuit probe car

1988-10-05

1990-04-17

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158F, 324500, 324 731, 324697, G01R 3102

Patent

active

049183745

ABSTRACT:
A method and apparatus for inspecting integrated circuit probe cards in which the probe points of the probe card are scanned across a checkplate having a conductivity transition border. The impedances between the probe points and the checkplate as they cross the conductivity transition border are measured to determine when the probe points cross the border. The positions of the probe card when each of the probe points crosses the border are measured to determine the positions of the probe points relative to each other. In one embodiment, the checkplate is formed by a square conductive plate having three quadrants of insulated material and a single quadrant of conductive material mounted on its upper surface. These conductive strips connected to the conductive plate are positioned between the quadrants of insulative material to form the conductivity transition border. In other embodiments, multiple parallel strips or a single dot of conductive material are surrounded by insulative material.

REFERENCES:
patent: 2851660 (1958-09-01), Tobin et al.
patent: 2866140 (1958-12-01), Jones et al.
patent: 3039604 (1962-06-01), Bickel et al.
patent: 3996517 (1976-12-01), Fergason et al.
patent: 4780836 (1988-10-01), Miyazaki et al.

Affiliated with

Also associated with

Rating

Method and apparatus for inspecting integrated circuit probe car does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for inspecting integrated circuit probe car, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for inspecting integrated circuit probe car will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1055137