Method and apparatus for inspecting integrated circuit pattern

Details Method and apparatus for inspecting integrated circuit pattern Method and apparatus for inspecting integrated circuit pattern

2005-11-09

2008-08-26

Karlsen, Ernest F (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C250S309000, C250S310000

Reexamination Certificate

active

07417444

ABSTRACT:
A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.

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