Method and apparatus for inspecting front surface shape

Details Method and apparatus for inspecting front surface shape Method and apparatus for inspecting front surface shape

2008-07-01

2008-07-01

Stafira, Michael P. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Transparent or translucent material

C356S239200

Reexamination Certificate

active

11561517

ABSTRACT:
The present invention provides an inspection method and an inspection apparatus which can remove influence of rear surface reflection image and inspect characteristic of a front surface shape with good accuracy by an inexpensive apparatus construction. First of all, as a stripe pattern suitable for a transparent plate-shaped object3(object to be inspected), a stripe pattern1having a bright-dark pattern configured so that its reflection image produced by the front surface of the transparent plate-shaped object and its reflection image produced by a rear surface of the transparent plate-shaped object are separated in an image signal obtained by image-capturing, is determined. Thereafter, using the decided stripe pattern1,the front surface shape of the transparent plate-shaped object3is evaluated by an image analysis using only a reflection image of the stripe pattern1produced by the transparent plate-shaped object3.

REFERENCES:
patent: 6392754 (2002-05-01), Pingel et al.
patent: 11-148813 (1999-06-01), None
patent: 2001-502800 (2001-02-01), None
patent: 2004-514882 (2004-05-01), None
“Hikari Gijutsu Contact”, Optical and Electrooptical Engineering Contact, published by Japan Optomechatronics Association, vol. 39, No. 2, 2001, pp. 103-110.

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