Method and apparatus for inspecting a surface state

Details Method and apparatus for inspecting a surface state Method and apparatus for inspecting a surface state

1997-10-21

1999-10-05

Pham, Hoa Q.

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

3562398, 3562375, 25055909, G01N 2188

Patent

active

059633166

ABSTRACT:
A method and apparatus for inspecting a surface state are used to examine first and second surfaces, e.g., two surfaces of a glass substrate on which a device pattern is formed, or one surface of a glass substrate and a pellicle for preventing attachment of foreign particles. When the first surface is illuminated from the first surface side while the second surface is illuminated from the second surface side, the first and second surfaces are illuminated with polarized light beams polarized in directions orthogonal to each other, respectively, and reflectively scattered light from the first surface is detected through an analyzer which intercepts the same polarized light as the polarized light illuminating the second surface. The S/N ratio of examination of the first surface is thereby improved.

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