Method and apparatus for inspecting a substrate

Details Method and apparatus for inspecting a substrate Method and apparatus for inspecting a substrate

2007-01-30

2007-01-30

Ahmed, Samir (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C250S307000

Reexamination Certificate

active

10017860

ABSTRACT:
A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or segmented detectors are used in a particle beam system.

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