Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-09-05
2006-09-05
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S031000, C700S046000, C700S052000, C700S096000, C700S110000, C700S175000, C700S177000
Reexamination Certificate
active
07103439
ABSTRACT:
A method for initializing process controllers based on tool event data includes providing a tool having a process controller adapted to employ a control model to control an operating recipe of the tool; receiving a tool event notification; and initializing the control model in response to receiving the tool event notification. A manufacturing system includes a tool and a process controller. The tool is adapted to process wafers in accordance with an operating recipe. The process controller is adapted to employ a control model to control the operating recipe in accordance with a control algorithm. The process controller is further adapted to receive a tool event notification and initialize the control model in response to receiving the tool event notification.
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Bode Christopher A.
Hewett Joyce S. Oey
Miller Michael L.
Pasadyn Alexander J.
Peterson Anastasia Oshelski
Advanced Micro Devices , Inc.
Picard Leo
Shechtman Sean
Williams, Morgan and Amerson
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