Method and apparatus for in situ visual inspection of die produc

Measuring and testing – Inspecting

Patent

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Details

H01L 2166

Patent

active

059749032

ABSTRACT:
An inspection station that is used to inspect an integrated circuit which is contained within a carrier tape and covered with a cover tape. The inspection station may include a spindle that receives an input reel which contains a carrier tape and a plurality of integrated circuits. The carrier tape can be attached to an output reel that is rotated by a drive motor. Another drive motor moves the carrier tape beneath a microscope that is located between the input reel and the output reel. The microscope may be coupled to a camera and a monitor which displays the integrated circuit. The inspection station may also include a de-taper mechanism which removes the cover tape before the integrated circuit is moved beneath the microscope, and a taper mechanism that reapplies cover tape back onto the integrated circuit. Removing the cover tape provides an unobstructed view of the integrated circuit. Removing the cover tape also allows the operator to replace defective integrated circuits on the carrier tape.

REFERENCES:
patent: 4389669 (1983-06-01), Epstein et al.
patent: 5473425 (1995-12-01), Tokumaru et al.

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