Electric heating – Metal heating – By arc
Patent
1991-06-06
1993-09-21
Albritton, C. L.
Electric heating
Metal heating
By arc
21912169, 21912183, B23K 2600
Patent
active
052471535
ABSTRACT:
The surface of an optical element, such as the taking lens in semiconductor photolithographic apparatus, is deformed, in situ, by applying heat to the surface. A recipe for applying the heat to a selected area of the lens surface is developed by either measuring the image projected by the lens and comparing the measured image to the specified (mask) image, or by measuring the contour of the surface of the lens and comparing the measured contour to the lens' specified contour. The heat is applied by a laser, the output of which is focussed and scanned onto the surface of the lens. Method and apparatus are disclosed.
REFERENCES:
patent: 3943278 (1976-03-01), Ramsey, Jr.
patent: 4290698 (1981-09-01), Milana
patent: 4297034 (1981-10-01), Ito et al.
patent: 4960320 (1990-07-01), Taniura
patent: 4960322 (1990-10-01), Khoshnevisan et al.
patent: 4960327 (1990-11-01), Sekine
patent: 4960332 (1990-04-01), Foldi et al.
patent: 4961646 (1990-02-01), Schrammli et al.
patent: 4969737 (1990-07-01), Humbel et al.
patent: 4984883 (1991-09-01), Winocur
patent: 4984886 (1991-03-01), Yoshida
patent: 4985618 (1991-02-01), Inada et al.
patent: 5149936 (1992-09-01), Walton, II
Albritton C. L.
Linden Gerald E.
LSI Logic Corporation
Rostoker Michael D.
LandOfFree
Method and apparatus for in-situ deformation of a surface, espec does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for in-situ deformation of a surface, espec, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for in-situ deformation of a surface, espec will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1052146