Method and apparatus for improving the yield of integrated circu

Details Method and apparatus for improving the yield of integrated circu Method and apparatus for improving the yield of integrated circu

1986-11-10

1988-04-26

Cohan, Alan

Fluid handling

Processes

Involving pressure control

13762411, 13762418, 1374875, G05D 1600

Patent

active

047397870

ABSTRACT:
A method and apparatus for reducing the incidence of product contamination during processing of the product in a vacuum chamber. By providing soft-start valves in the vacuum and vent lines, and by properly driving said soft-start valves, it is possible to reduce the gas flow rates from and into the vacuum chamber to such a low level, that dust-like particles remaining in the chamber from prior product processing steps is not disturbed and allowed to settle upon the product then being treated.

REFERENCES:
patent: 3429336 (1969-02-01), Moriyama
patent: 4054151 (1977-10-01), Parker
patent: 4394871 (1983-07-01), Czajka

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