Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Patent
1997-08-21
1999-07-06
Breneman, Bruce
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
438715, H01L 218242
Patent
active
059207639
ABSTRACT:
A wafer fabrication system and method improves the structural integrity of capacitor structures. The wafer fabrication system contains an etching area and a deposition area which are connected with a common vacuum. In the etching area, the support material surrounding the bottom electrode of a stacked capacitor is removed with vapor etching techniques. The exposed bottom electrode of the stacked capacitor is then robotically transferred within the common vacuum to the deposition area where a dielectric layer is applied to the exposed bottom electrode.
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Breneman Bruce
Micro)n Technology, Inc.
Olsen Alan
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