Method and apparatus for improving the sensitivity of a leak det

Details Method and apparatus for improving the sensitivity of a leak det Method and apparatus for improving the sensitivity of a leak det

1984-04-10

1986-06-10

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62100, 62268, 7386311, 417901, B01D 800

Patent

active

045935300

ABSTRACT:
A cryopump and method for using cryopumping to enhance the sensitivity of a leak detection system. The cryopump is used to control the relative pumping speeds of the gases normally frozen out on the pump or adsorbed in a cold adsorbent to thereby achieve the enhanced sensitivity of the system. The system is characterized by controlled access to the cold panel which is disposed within the warm panel.

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patent: 4425811 (1984-01-01), Chatzipetros et al.

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