Method and apparatus for improved temperature control in rapid t

Details Method and apparatus for improved temperature control in rapid t Method and apparatus for improved temperature control in rapid t

1997-08-27

1998-11-24

Paschall, Mark H.

Electric heating

Heating devices

With power supply and voltage or current regulation or...

219502, 21912143, 374121, 374161, B23K 1000

Patent

active

058411100

ABSTRACT:
A method for Rapid Thermal Processing (RTP) is presented, wherein the broadband reflectivity of an object is measured, and the results of the measurement used by the RTP system to adjust the RTP system parameters used in processing the object.

REFERENCES:
patent: 4854724 (1989-08-01), Adams et al.
patent: 5118200 (1992-06-01), Kirillov et al.
patent: 5354323 (1994-10-01), Whitebook
patent: 5627081 (1997-05-01), Tsvo et al.
patent: 5628564 (1997-05-01), Nenyei et al.
patent: 5641419 (1997-06-01), Vandenabeele

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