Method and apparatus for improved pumping medium for...

Details Method and apparatus for improved pumping medium for... Method and apparatus for improved pumping medium for...

2004-06-30

2008-12-02

Freay, Charles G (Department: 3746)

Pumps

Electrical or getter type

C204S600000

Reexamination Certificate

active

07458783

ABSTRACT:
A pumping medium for an electro-osmotic pump made of porous silicon. The porous silicon may result in a lower required pumping voltage and a smaller form factor for an equivalent flow rate and pressure generation as compared to conventional glass frits. The porous silicon may also provide a better thermodynamic efficiency over conventional glass frits for use in electro-osmotic pumps. The increased efficiency of the porous silicon may provide an low-power, high flow rate, high pressure, small form factor, vibration-free pump for cooling microelectronic devices, such as integrated circuit chips.

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patent: 2003/0164231 (2003-09-01), Goodson et al.
patent: 2003/0173942 (2003-09-01), Kenny, Jr. et al.

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