Metal working – Method of mechanical manufacture – Shaping one-piece blank by removing material
Reexamination Certificate
2004-12-08
2009-06-30
Lund, Jeffrie R (Department: 1792)
Metal working
Method of mechanical manufacture
Shaping one-piece blank by removing material
C118S715000, C156S345290
Reexamination Certificate
active
07552521
ABSTRACT:
An apparatus related to plasma chambers used for processing semiconductor substrates and specifically to improvements in pumping baffle plates used in plasma sources. An apparatus and method for making a baffle plate assembly formed from a modified baffle plate blank wherein a variety of pumping features are formed in the baffle plate blank and opened in a planar material removal operation.
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Lund Jeffrie R
Tokyo Electron Limited
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