Method and apparatus for implementing an afterglow emission...

Details Method and apparatus for implementing an afterglow emission... Method and apparatus for implementing an afterglow emission...

2005-12-13

2005-12-13

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

C118S715000

Reexamination Certificate

active

06975393

ABSTRACT:
Afterglow spectroscopy allows observing light emission of gaseous species in absence of direct plasma light. This absence avoids the creation of a background spectrum obscuring weak emission from trace species. The invention describes a flowing afterglow version monitoring in-situ the cleanup of vacuum tools during pump/purge cycles. The invention also describes an intermittent afterglow version suitable for trace gas analysis at atmospheric pressure.

REFERENCES:
patent: 5831728 (1998-11-01), Malczewski et al.
patent: 5963336 (1999-10-01), McAndrew et al.
patent: 6105589 (2000-08-01), Vane
patent: 6197123 (2001-03-01), Poag et al.
patent: 6279503 (2001-08-01), Choi et al.

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