Method and apparatus for imaging using continuous non-raster...

Details Method and apparatus for imaging using continuous non-raster... Method and apparatus for imaging using continuous non-raster...

2006-03-07

2006-03-07

Allen, Stephone B. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C205S118000, C356S237300

Reexamination Certificate

active

07009172

ABSTRACT:
A method and apparatus for performing data collection within a device is disclosed. A device steers a scanning probe in a continuous, non-raster pattern across a specimen. The specimen is supported by a stage, and data is collected in response to interaction between the probe and the specimen to form a data set. Spiral scanning patterns without turnaround regions are utilized in embodiments of the present invention, both with and without rounded corners in the scanning patterns.

REFERENCES:
patent: 5865978 (1999-02-01), Cohen
patent: 6271916 (2001-08-01), Marxer et al.
patent: 6606153 (2003-08-01), Marxer et al.
patent: 2001/0047682 (2001-12-01), Samsavar et al.
patent: 2003/0089162 (2003-05-01), Samsavar et al.

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