Method and apparatus for imaging three-dimensional structure

Details Method and apparatus for imaging three-dimensional structure Method and apparatus for imaging three-dimensional structure

2008-12-03

2009-12-08

Punnoose, Roy (Department: 2886)

Optics: measuring and testing

Shape or surface configuration

C356S609000

Reexamination Certificate

active

07630089

ABSTRACT:
An apparatus for determining surface topology of a portion (26) of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

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