Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1998-08-04
2000-09-26
Aftergut, Jeff H.
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
156584, 438464, H01L 21301, B32B 3118
Patent
active
061238007
ABSTRACT:
A system for handling semiconductor and electronic elements secured to an adhesive surface is provided. According to one aspect of the invention, a vacuum is applied through holes in a loading base. Under the influence of the vacuum, the adhesive film is pulled down toward the loading base and stretched around a pick rod so that the adhesive film is peeled away from the element. Thus, adhesive contact between the film and the element is reduced and a vacuum pick or collet is able to lift the element from the adhesive film with minimal force applied to the surface of the element.
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Freund Joseph M.
Przybylek George J.
Romero Dennis M.
Stayt, Jr. John W.
Aftergut Jeff H.
Lucent Technologies - Inc.
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