Method and apparatus for handling element on an adhesive film

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means

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Details

156584, 438464, H01L 21301, B32B 3118

Patent

active

061238007

ABSTRACT:
A system for handling semiconductor and electronic elements secured to an adhesive surface is provided. According to one aspect of the invention, a vacuum is applied through holes in a loading base. Under the influence of the vacuum, the adhesive film is pulled down toward the loading base and stretched around a pick rod so that the adhesive film is peeled away from the element. Thus, adhesive contact between the film and the element is reduced and a vacuum pick or collet is able to lift the element from the adhesive film with minimal force applied to the surface of the element.

REFERENCES:
patent: 4296542 (1981-10-01), Gotman
patent: 4472218 (1984-09-01), Avedissian et al.
patent: 4711014 (1987-12-01), Althouse
patent: 4778326 (1988-10-01), Althouse et al.
patent: 4859269 (1989-08-01), Nishiguchi
patent: 4921564 (1990-05-01), Moore
patent: 5589029 (1996-12-01), Matsui et al.

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