Method and apparatus for growing diamond films

Details Method and apparatus for growing diamond films Method and apparatus for growing diamond films

1992-07-02

1994-10-25

Breneman, R. Bruce

Single-crystal, oriented-crystal, and epitaxy growth processes;

Forming from vapor or gaseous state

With decomposition of a precursor

423446, 117103, 117929, C30B 2904

Patent

active

053585968

ABSTRACT:
A supersonic, direct-current arcjet is designed for expansion into low pressure, the arcjet operates as mixtures of hydrogen and argon to convert molecular hydrogen to atomic hydrogen and direct the atomic hydrogen to a substrate surface. A hydrocarbon (methane or acetylene) is introduced in the arcjet plume where it is converted to hydrocarbon precursors and is directed to the substrate surface where it combines with the atomic hydrogen to produce a diamond film.

REFERENCES:
patent: 4961958 (1990-10-01), Desphandey et al.
patent: 5104634 (1992-04-01), Calcote
patent: 5110405 (1992-05-01), Sawabe et al.
patent: 5204145 (1993-04-01), Gasworth

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