Coherent light generators – Short wavelength laser
Patent
1992-12-31
1994-05-31
Gonzalez, Frank
Coherent light generators
Short wavelength laser
372 87, H01S 3097, H01S 330
Patent
active
053175743
ABSTRACT:
A method and apparatus for producing x-ray and/or extreme ultraviolet (EUV) is described. A liquid edge 2 is electrically connected to a cathode 8 via a high voltage pulse power supply 10. Liquid edge 2 is set to be parallel to cathode 8. When high voltage pulse power supply 10 is turned on, a vacuum discharge will occur in a space between liquid edge 2 and cathode 8. The plasma will be confined into a high density and high temperature thin plasma column 4 in a space near liquid edge 2 by strong magnetic field induced by the huge discharge current. A population inversion in the confined plasma column will lead to a amplified simultaneous emission of x-ray and/or EUV 6 along the axis of plasma column 4. Moreover, a large power x-ray and/or EUV laser can be built by using multi-liquid edge-shape anodes placed in a straight line and operated in a traveling-wave mode.
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