Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1995-08-23
1997-05-27
Gorgos, Kathryn L.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
C01B 1310
Patent
active
056328680
ABSTRACT:
Ozonizer (10) which supplies a feed gas to ozone generating cell (11) under application of a high voltage and which delivers an ozone gas through an ozone gas transport path (consisting of pipes (14) and (15)) as it has been generated in said ozone generating cell (11) is characterized in that the ozone gas transport path is furnished with means for removing at least one of NOx, HF and SOx (in the drawings, the means is for removing NOx) and that the ozone gas from the ozone generating cell (11) is passed through said removing means, whereby at least one of NOx, HF and SOx in said ozone gas is removed before it is delivered to a subsequent stage. The product ozone is not contaminated with Cr compounds at all or insufficiently contaminated to cause any practical problems in the fabrication of highly integrated semiconductor devices.
Alternatively, ozonizer (10) which comprises an ozone generating cell (11) having an inlet (8) for supplying a feed gas, high voltage applying means (35) and an outlet (29) for discharging the ozone generated, and ozone delivery paths (30) and (31) for delivering the generated ozone is characterized in that oxygen (1) supplemented with 10-20 vol % of carbon dioxide and/or carbon monoxide (2) is used as the feed gas. The thus produced ozone is significantly low in the level of Cr compounds and, hence, can suitably be used in the formation of metal oxides, in particular, silicon oxide.
REFERENCES:
patent: 2700648 (1955-01-01), Thorp et al.
patent: 2857323 (1958-10-01), Cromwell
patent: 5370846 (1994-12-01), Yokomi et al.
Database WPI--Derwent Publications Ltd., London, GB (Abstract of JP-A-57-183 304, 11 Nov. 1982).
Patent Abstracts of Japan--vol. 006 No. 180 (C-125), 14 Sep. 1982 Abstract of JP-A-57 095808.
Chemical Abstracts, vol. 114, No. 4, 28 Jan. 1991, Abstract No. 26681v (Abstract of JP-A-02-208 204).
Harada Minoru
Kaji Naruhiko
Miyazaki Kunihiro
Nakano Yutaka
Nakata Rempei
Ebara Corporation
Gorgos Kathryn L.
Mayekar Kishor
LandOfFree
Method and apparatus for generating ozone and methods of its use does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for generating ozone and methods of its use, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for generating ozone and methods of its use will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2326513