Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2004-03-24
2009-08-18
Berman, Jack I (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S505100, C250S492200, C250S492100, C250S461100, C378S119000, C378S143000, C378S034000
Reexamination Certificate
active
07576343
ABSTRACT:
The present invention provides a method of delivering solid material at a position far enough from any surrounding solid with high enough target density without scattering debris to the environment. In the present invention, radiation is generated from plasma produced by laser irradiation on a material. This material is a cluster of particles that is composed of many fine particles bound together with a binder that vaporizes at temperature lower than melting point of fine particles. Density of particles in a particle-cluster8is increased by vaporizing a solvent7by heating a droplet5with the irradiation of laser6. Solvent of a droplet occupies large fraction of the droplet in order to stabilize droplet generation. This solvent is vaporized prior to delivery to a vacuum chamber9for plasma generation. This vaporization helps to avoid degradation of vacuum of the chamber9. The diameter of a particle-cluster thus condensed is several tens μm.
REFERENCES:
patent: 6002744 (1999-12-01), Hertz et al.
patent: 6507641 (2003-01-01), Kondo et al.
patent: 6814239 (2004-11-01), Suzuki et al.
patent: 6831963 (2004-12-01), Richardson
patent: 11-250842 (1999-09-01), None
patent: 2000-91095 (2000-03-01), None
patent: 2000-215998 (2000-08-01), None
patent: 2001-108799 (2001-04-01), None
patent: 2002-8891 (2002-01-01), None
patent: 2002-239377 (2002-08-01), None
patent: 02/46839 (2002-06-01), None
Sugar, Jack: “Potential-Barrier Effects in Photoabsorption. II. Interpretation of Photoabsorption Resonances in Lanthanide Metals at the 4d-Electron Threshold”, Physical Review B, vol. 5, No. 5, pp. 1785-1792, 1972.
O'Sullivan, G. et al: “4d-4femission resonances in laser-produced plasmas”, Journal of Optical Society of America, vol. 71, No. 3, pp. 227-230, 1981.
Bender, H.A. et al.: “Velocity characterization of particulate debris from laser-produced plasmas used for extreme-ultraviolet lithography”, Applied Optics, vol. 34, No. 28, pp. 6513-6521, 1995.
“Theoretical consideration on power limit of EUV source”, National Institute of Advanced Industrial Science and Technology, AIST01-A00007, Ver. 1.1. pp. 1-30, 2002. (with partial English translation).
Schwenn, U. et al.: “A Continuous droplet source for plasma production with pulse laser”, Journal of Physics E: Scientific Instruments, vol. 7, p. 715-718, 1974.
Rymell, L. et al.: “Droplet target for low-debris laser-plasma soft X-ray generation”, Optics Communications, vol. 103, No. 1-2, pp. 105-110, 1993.
Eickmans, Johannes H. et al.: “Plasma spectroscopy H, Li, and Na in plumes resulting from laser-induced droplet explosion”, Applied Optics, vol. 26, No. 17, pp. 3721-3725, 1987.
Tompkins, R.J. et al.: “5-20 keV laser-induced x-ray generation at 1 kHz from a liquid-jet target”, Review of Scientific Instruments, vol. 69, No. 9, pp. 3113-3117, 1998.
Berman Jack I
National Institute of Advanced Industrial Science and Technology
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Sahu Meenakshi S
LandOfFree
Method and apparatus for generating laser produced plasma does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for generating laser produced plasma, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for generating laser produced plasma will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4067960