Method and apparatus for generating ion beams

Radiant energy – Ion generation – Electron bombardment type

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3133601, 3133631, 31511181, H01J 2720

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active

047148349

ABSTRACT:
In an ion beam source, the plasma is contained near the extraction front by a cup-shaped magnetic field for improved stability and uniformity. The intermediate electrode has a profiled electron beam aperture having a first narrowest section, a second slightly wider section, and the third, known, conical section. The anode electrode or anode insert has a very narrow entrance aperture followed by outwardly flared, longer, section.

REFERENCES:
patent: 3238414 (1966-03-01), Kelley et al.
Shubaly and Hamm, IEEE Transactions on Nuclear Science, vol. NS-28, No. 2, Apr. 1981, pp. 1316-1318.
Shubaly and deJong, IEEE Transactions on Nuclear Science, vol. NS-30, No. 2, Apr. 1983, pp. 1399-1401.

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