Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1996-08-29
1998-11-03
Font, Frank G.
Optics: measuring and testing
By polarized light examination
With light attenuation
25055922, 359389, G01B 1124, G01N 2194, G02B 2106
Patent
active
058317368
ABSTRACT:
A method and apparatus for generating an image of a specimen comprises dividing the in-focus plane of an objective of an optical apparatus into a plurality of grid regions. Incident light is directed to the grid regions to illuminate surface portions of the specimen that are within the grid regions. Light reflected from the surface portions is sensed to determine approximate spatial slopes of each surface portion associated with each grid region. The spatial slopes are integrated to generate a topographical map representative of surface portions of the specimen that are within the depth of focus of the objective. Consecutive planes can be obtained to generate topographical maps thicker than the depth of focus of the objective.
REFERENCES:
patent: 4579454 (1986-04-01), Kleinknecht
patent: 4627730 (1986-12-01), Jungerman et al.
patent: 4641972 (1987-02-01), Halioua et al.
patent: 4668094 (1987-05-01), Matsumoto et al.
patent: 4802759 (1989-02-01), Matsumoto et al.
patent: 4844617 (1989-07-01), Kelderman et al.
patent: 4867570 (1989-09-01), Sorimachi et al.
patent: 4884880 (1989-12-01), Lichtman et al.
patent: 4884881 (1989-12-01), Lichtman et al.
patent: 5020891 (1991-06-01), Lichtman et al.
patent: 5076693 (1991-12-01), Teramoto
patent: 5099354 (1992-03-01), Lichtman et al.
patent: 5099363 (1992-03-01), Lichtman
patent: 5166505 (1992-11-01), Gorriz et al.
patent: 5235457 (1993-08-01), Lichtman et al.
patent: 5239366 (1993-08-01), Kittell et al.
patent: 5243665 (1993-09-01), Maney et al.
patent: 5245864 (1993-09-01), Sanchez
patent: 5351150 (1994-09-01), Lichtman et al.
patent: 5493400 (1996-02-01), Gorbler et al.
patent: 5587832 (1996-12-01), Krause
patent: 5659420 (1997-08-01), Wakai et al.
M.J. Offside, M.G. Somekh, and C.W. See, "Common path scanning heterodyne optical profilometer for absolute phase measurement", Appl. Phys. Lett 55 (20), pp. 2051-2053, Nov. 13, 1989.
M.J. Offside and M.G. Somekh, "Interferometric scanning optical microscope for surface characterization", Appl. Opt. 31 (31), pp. 6772-6782, Nov. 1, 1992.
Y. Fainman, E. Lenz, and J. Shamir, "Optical profilometer: a new method for high sensitivity and wide dynamic range", Appl. Opt. 21 (17), pp. 3200-3208, Sep. 1, 1982.
M.R. Atkinson, A.E. Dixon, and S. Damaskinos, "Surface-profile reconstruction using reflection differential phase-contrast microscopy", Appl. Opt. 31 (31), pp. 6765-6771, Nov. 1, 1992.
M.R. Atkinson and A.E. Dixon, "Single-pinhole confocal differential phase contrast microscopy", Appl. Opt. 33 (4), pp. 641-653, Feb. 1, 1994.
K.M. Lee and C.-C.J. Kuo, "Surface reconstruction from photometric stero images", J. Opt. Soc. Am. A 10 (5), pp. 855-868, May 1993.
D. Pantzer, J. Politch, and L. Ek, "Heterodyne profiling instrument for the angstrom region", Appl. Opt. 25 (22), pp. 4168-4172, Nov. 15, 1986.
Conchello Jose-Angel
Lichtman Jeff W.
Font Frank G.
Smith Zandra V.
Washington University
LandOfFree
Method and apparatus for generating a three-dimensional topograp does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for generating a three-dimensional topograp, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for generating a three-dimensional topograp will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-695930