Optics: measuring and testing – Fiducial instruments
Patent
1988-10-24
1990-10-16
McGraw, Vincent P.
Optics: measuring and testing
Fiducial instruments
G01C 1500
Patent
active
049630229
ABSTRACT:
A system for generating a spatially stable, small diameter light beam (18) which serves as a straight reference line over long distances may use the direction of propagation of light and one fixed point (11, 12) or may be between two fixed points (12, 21). In either instance, a light source (1) emits a beam (2) which is expanded, collimated and spatially filtered (3, 4). In the first instance, the collimated light wave (11) produced is diffracted by a sphere (12) to produce the small diameter light beam (18) which is constituted by a continuum of spots (16) which, in turn, produces a Poisson's spot (16) on a detector (21) which spatially samples the intensity of the spot (16). The resultant voltage (22) from each active detection are sent to a center locating electronics/computer (24) which processes the voltages (22) to give the position of the detector (21) relative to the straight reference line (18). In the second instance, the collimated light wave (11) is produced by reflecting the beam (5) passing through the pinhole (4) from a steering mirror (6) which can be tilted about two axes by applying error signal voltages (27, 28) to tilt adjusters (7, 8) which are related to the displacement of spot (16) from the center of detector (21) in the X and Y directions. The tilting of the mirror (6) changes the angle of incidence of the light wave (11) on the sphere (12) so that the spot (16) is centered on the detector (21).
REFERENCES:
patent: 3588255 (1971-06-01), Alexander
Progress in Optics I, Wolf, 1961, pp. 308-311.
The Principles of Optics, Hardy and Perrin, 1932, pp. 127-130.
Introduction to Optics Geometrical and Physical, Roseatson, 1959, pp. 187-196.
McGraw Vincent P.
Turner S. A.
Zygo Corporation
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