Method and apparatus for generating a plurality of radiation bea

Details Method and apparatus for generating a plurality of radiation bea Method and apparatus for generating a plurality of radiation bea

1991-09-27

1993-06-08

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, 356363, 359571, G01B 902

Patent

active

052184234

ABSTRACT:
A beam-slicer (6) for generating a plurality of radiation beams, or pencil beams (7), from incident radiation (3). Each of the beams is directed to a different region of space. The beam-slicer includes a substrate (17) that, for a transmission grating embodiment, is comprised of a material that is substantially transparent to incident radiation having wavelengths of interest. The substrate includes a plurality of regions, or sub-apertures (8), formed within a surface thereof, each of the regions defining a blazed transmission or reflection grating for deviating incident radiation into a radiation beam. The blazed diffraction grating is formed such that the wavelengths of interest within each radiation beam are simultaneously deviated at a same, predetermined angle. Also disclosed is a Sample Point Interferometer that includes the beam-slicer. The beam-slicer generates pencil beams, each of which is directed to a retroreflector (9) positioned upon a surface of a structure (10) under measurement.

REFERENCES:
patent: 4022532 (1977-05-01), Montagnino
patent: 4486096 (1984-12-01), Endo et al.
patent: 4886341 (1989-12-01), Oishi et al.
patent: 5080490 (1992-01-01), Manhart

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